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Fabrication and characterization of p-CuOx/n-Si heterojunction diodes with various oxygen flow by RF magnetron sputtering

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Fabrication and characterization of p-CuOx/n-Si heterojunction diodes with various oxygen flow by RF magnetron sputtering
저자
김은규
발행일
2022-02-18
학회명
제 62회 한국진공학회 동계정기학술대회
개최지
횡성 웰리힐리파크

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