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In-Situ ALD-Assisted Subthreshold Swing Control in IGZO/Al2O3 Multi Channel Structured TFT

제목
In-Situ ALD-Assisted Subthreshold Swing Control in IGZO/Al2O3 Multi Channel Structured TFT
저자
박진성
발행일
2023-08-24
학회명
IMID 2023
개최지
부산 해운대

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