Characterization of deep levels in GaInP on Ge and Ge-on-Si substrates by photoluminescence and cathodoluminescence

초록

We investigated the deep level photoluminescence and cathodoluminescence emissions from GaInP grown on Ge and Ge-on-Si substrates by metal-organic chemical vapor deposition. Considering the interface condition after the growth of GaInP on Ge, we speculated that the P vacancies and/or Ge atoms from the underlying layer due to interdiffusion were responsible for the deep level emissions. Moreover, the anti-phase boundaries in GaInP, incompletely suppressed even when grown on off-axis Ge substrates, were also responsible for the deep level emissions.

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