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FABRICATION OF PERFECT APERTURE FOR MICRO SOURCE LENSES IN ELECTRON BEAM SYSTEMS USING FOCUSED ION BEAM

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FABRICATION OF PERFECT APERTURE FOR MICRO SOURCE LENSES IN ELECTRON BEAM SYSTEMS USING FOCUSED ION BEAM
저자
박재근
발행일
2003-10-24
학회명
한국 물리학회 2003년도 가을 학술논문발표회
개최지
경북대학교

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