The Synthesis and Properties of Zn-oxide Nanoparticles Dispersed in a Polyimide Film

초록

The synthesis of Zn oxide (ZnO) nanoparticles in a polyimide (PI) film has been investigated. The PI precursors used in this study were BPDA-PDA and ODPA-3SDA type polyamic acids (PAAs). PAA was spin-coated onto Zn thin films which had been deposited on the SiO2/Si, glass, or quartz substrates. The thin film stacks were soft-baked at 135℃ for 30 min and cured at the temperature between 200℃ and 400℃ for various holding time in a nitrogen atmosphere. The particle formation was characterized using transmission electron microscopy (TEM). Optical absorption and photoluminescence (PL) measurement were carried out to investigate the optical properties of ZnO nanoparticles in a PI film. Zn thin film reacted with PAA, and ZnO nanoparticles precipitated during imidization of PAA into PI. TEM images showed 5-15 nm ZnO nanoparticles uniformly distributed in the PI filmand the particle size depended on the curing condition. Two examples are shown in Fig. 1. The optical absorption peaks and PL spectra related to the ZnO nanoparticles were observed. The change in particle size during curing and their optical properties will be presented.