ScholarWorks@한양대학교

상세 보기

Investigating Grain Growth in CVD and Sputtered Si Films for 3D DRAM Applications

제목
Investigating Grain Growth in CVD and Sputtered Si Films for 3D DRAM Applications
저자
안진호
발행일
2024-01-19
학회명
2024 nano convergence conference
개최지
대전컨벤션센터

ScholarWorks@한양대학교

(04763) 서울특별시 성동구 왕십리로 222 Tel. +82-2-2220-1370 +82-2-2220-1366

COPYRIGHT © 한양대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.