ScholarWorks@한양대학교

상세 보기

Effect of Hydrogen annealing on COP induced xoide breakdown for nitrogen doped wafers

  • 박재근
제목
Effect of Hydrogen annealing on COP induced xoide breakdown for nitrogen doped wafers
저자
박재근
발행일
2000-03-31
학회명
일본응용물리학회 2000년 춘계분과회

ScholarWorks@한양대학교

(04763) 서울특별시 성동구 왕십리로 222 Tel. +82-2-2220-1370 +82-2-2220-1366

COPYRIGHT © 한양대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.