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- 제목
- The Effect of Si4+ Dissolution on the stability of silica particles and its influence on Chemical Mechanical Polishing process for interlayer dielectric
- 저자
- 박재근
- 발행일
- 2000-11-01
- 학회명
- International Symposium on the Physics of Semiconductors and Applications-2000
- 개최지
- 제주도