Facile control of p-type SnO TFT performance with restraining redox reaction by ITO interlayers

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초록

By comparing Ni and ITO electrodes of SnO TFT, we find a facile method to control p-type SnO TFT performance. A Ni-electrode TFT has a high field-effect mobility of 3.3 cm2/Vs and a low on/off current ratio of 3.6 × 101. Compared to Ni, ITO-electrode TFT has low field-effect mobility of 1.4 cm2/Vs and a high on/off current ratio of 1.1 × 103. Using various analysis methods, we suggested why the electrical properties of SnO TFT differed depending on the electrode materials. First, a redox reaction occurs at the interface of SnO and Ni during the post-annealing process. Second, Ni has an ohmic-like contact formation with SnO, which lowers the Schottky barrier height of carriers. ITO ILs are adopted to Ni electrode to reduce the off-current by hindering the redox reaction. The off-current of TFTs is effectively reduced with ITO ILs as thickness increases. An ITO IL that is 10-nm thick yields the optimum electrical properties: field-effect mobility of 2.5 cm2/Vs, Ion/Ioff of 1.7 × 103 and Vth shift under NBS of −1.4 V.

키워드

Atomic layer deposition (ALD)tin monoxide (SnO)thin-film transistorssourcedrain modulationoff-current reductionOXIDATIONNICKELLAYER
제목
Facile control of p-type SnO TFT performance with restraining redox reaction by ITO interlayers
저자
Choi, Su-HwanKim, Hye-MiPark, Jin Seong
DOI
10.1080/15980316.2022.2151522
발행일
2023-04
유형
Article; Early Access
저널명
Journal of Information Display
24
2
페이지
119 ~ 125