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Control of localized galvanic corrosion between tungsten and titanium nitride during chemical mechanical planarization,
- 제목
- Control of localized galvanic corrosion between tungsten and titanium nitride during chemical mechanical planarization,
- 저자
- 백운규
- 발행일
- 2016-04-18
- 학회명
- 19th Topical Metting : Electrochemistry at Modified Interface
- 개최지
- Auckland, New Zealand