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Effect of Alkaline Agent with Organic Additive in Colloidal Silica Slurry on Polishing Rate Selectivity of Polysilicon-to SiO2 in Polysilicon CMP

  • 박재근
제목
Effect of Alkaline Agent with Organic Additive in Colloidal Silica Slurry on Polishing Rate Selectivity of Polysilicon-to SiO2 in Polysilicon CMP
저자
박재근
발행일
2008-05-20
학회명
213th ECS Meeting
개최지
Phoenix Convention center(USA)

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