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Quality of Grown-in Defects Free CZ Silicon Single Crystal, "Pure Silicon"

  • 박재근
제목
Quality of Grown-in Defects Free CZ Silicon Single Crystal, "Pure Silicon"
저자
박재근
발행일
2000-11-21
학회명
Adavnced Science and Technology of Silicon Materials
개최지
Kona, Hawaii, U.S.A

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