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Effects of in-situ remote plasma treatment on amorphous indium gallium zinc oxide thin film transistors using the double layers as an active layer
- 제목
- Effects of in-situ remote plasma treatment on amorphous indium gallium zinc oxide thin film transistors using the double layers as an active layer
- 저자
- 홍진표
- 발행일
- 2011-07-04
- 학회명
- International Conference on Microelectronics and Plasma Technology
- 개최지
- Dalian