Effects of in-situ remote plasma treatment on amorphous indium gallium zinc oxide thin film transistors using the double layers as an active layer

제목
Effects of in-situ remote plasma treatment on amorphous indium gallium zinc oxide thin film transistors using the double layers as an active layer
저자
홍진표
발행일
2011-07-04
학회명
International Conference on Microelectronics and Plasma Technology
개최지
Dalian