Effect of oxygen incorporation in AlxGa1-xN layers grown by hydride vapor phase epitaxy

  • 김은규
제목
Effect of oxygen incorporation in AlxGa1-xN layers grown by hydride vapor phase epitaxy
저자
김은규
발행일
2022-05-24
학회명
5th International Workshop on Ultraviolet Materials and Devices (IWUMD 2022)
개최지
Jeju