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The effect of crystallinity of ceria particles on PETEOS removal rate in Chemical Mechanical Polishing for Shallow Trench Isolation

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The effect of crystallinity of ceria particles on PETEOS removal rate in Chemical Mechanical Polishing for Shallow Trench Isolation
저자
박재근
발행일
2002-02-21
학회명
한국 반도체 학술대회
개최지
천안상록리조트

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