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Multi-step Ion Beam Etching of Sub-30 nm Scale Magnetic Tunnel Junctions for Reducing Leakage Path and MgO Barrier Damage
- 제목
- Multi-step Ion Beam Etching of Sub-30 nm Scale Magnetic Tunnel Junctions for Reducing Leakage Path and MgO Barrier Damage
- 저자
- 이승백
- 발행일
- 2011-11-02
- 학회명
- 58th annual conference on magnetism and magnetic materials
- 개최지
- Scottsdale, Arizona, USA