Multi-step Ion Beam Etching of Sub-30 nm Scale Magnetic Tunnel Junctions for Reducing Leakage Path and MgO Barrier Damage

제목
Multi-step Ion Beam Etching of Sub-30 nm Scale Magnetic Tunnel Junctions for Reducing Leakage Path and MgO Barrier Damage
저자
이승백
발행일
2011-11-02
학회명
58th annual conference on magnetism and magnetic materials
개최지
Scottsdale, Arizona, USA