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Study on Atomic Layer Deposition of ZnS Thin Films for Application as a Channel Layer of OITFT

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Study on Atomic Layer Deposition of ZnS Thin Films for Application as a Channel Layer of OITFT
저자
전형탁
발행일
2006-11-28
학회명
MRS 2006 Fall Meeting
개최지
Hynes Convention Center, Boston

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