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The Electrical Performance Difference of TFTs Using SiOx Gate Insulator Deposited by PECVD and PEALD with DIPAS Precursor

제목
The Electrical Performance Difference of TFTs Using SiOx Gate Insulator Deposited by PECVD and PEALD with DIPAS Precursor
저자
박진성
발행일
2020-02-04
학회명
The 27th Korean Conference on Semiconductors (KCS 2020)

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