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Increase in the Adsorption Density of Anionic Molecules on Ceria and Its Influence on Remaining Particles on Oxide Film During Shallow Trench Isolation(STI) Chemical Mechanical Planarization (CMP)
- 제목
- Increase in the Adsorption Density of Anionic Molecules on Ceria and Its Influence on Remaining Particles on Oxide Film During Shallow Trench Isolation(STI) Chemical Mechanical Planarization (CMP)
- 저자
- 백운규
- 발행일
- 2010-04-06
- 학회명
- 2010 MRS SPRING MEETING
- 개최지
- San Freancisco