Fabrication of 2D photonic crystal assisted Y2O3:Eu3+ thin-film phosphors by direct nano-imprinting

Ko, Ki-Young; Her, Eun-Jin; Nichols, William T.; Lee, Heon; Do, Young Rag; Ahn, Jinho

doi:10.1016/j.mee.2011.03.162

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Fabrication of 2D photonic crystal assisted Y2O3:Eu3+ thin-film phosphors by direct nano-imprinting

Ko, Ki-Young;
Her, Eun-Jin;
Nichols, William T.;
Lee, Heon;
Do, Young Rag;
... Ahn, Jinho

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10

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11

초록

The effect of a two-dimensional Y2O3:Eu3+ photonic crystal (PC) pattern on the extraction efficiency of photoluminescence from the underlying Y2O3:Eu3+ thin-film phosphor was investigated. The photonic crystal structure was fabricated using a direct nano-imprint process with a Pechini-type Y2O3:Eu3+ sol as the nano-imprint resin and a patterned polydimethylsiloxane (PDMS) stamp as the mold. The elevated pressure and temperature of the nano-imprinting process converts the Y2O3:Eu3+ sol into a Y2O3:Eu3+ gel resulting in high definition transfer of the 2D patterns of the master template into the gel on top of the Y2O3:Eu3+ thin-film phosphor layer. The extraction efficiency of the 2D Y2O3:Eu3+ gel PC-assisted Y2O3:Eu3+ thin-film phosphor was approximately 3.7 times higher than a non-PC Y2O3:Eu3+ gel coated Y2O3:Eu3+ thin-film phosphor.

키워드

Nano-imprint; PDMS stamp; Photonic crystal; Thin-film phosphor; Sol-gel; LUMINESCENCE; LITHOGRAPHY

제목: Fabrication of 2D photonic crystal assisted Y2O3:Eu3+ thin-film phosphors by direct nano-imprinting

저자: Ko, Ki-Young; Her, Eun-Jin; Nichols, William T.; Lee, Heon; Do, Young Rag; Ahn, Jinho

DOI: 10.1016/j.mee.2011.03.162

발행일: 2011-09

유형: Article

저널명: Microelectronic Engineering

권: 88

호: 9

페이지: 2930 ~ 2933