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Effects of Grain Size and Molecular Weight of Surfactant in Nano-Ceria Slurry on Removal Selectivity of SiO2/Si3N4 Films on Pattern Wafers
- 제목
- Effects of Grain Size and Molecular Weight of Surfactant in Nano-Ceria Slurry on Removal Selectivity of SiO2/Si3N4 Films on Pattern Wafers
- 저자
- 백운규
- 발행일
- 2005-06-09
- 학회명
- china nano 2005
- 개최지
- 중국 베이징