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Physical, Chemical, and Electrical Properties of Molecular Layer Deposited Alucone Thin Films using Trimethyl-aluminum and Hydroquinone
- 제목
- Physical, Chemical, and Electrical Properties of Molecular Layer Deposited Alucone Thin Films using Trimethyl-aluminum and Hydroquinone
- 저자
- 박진성
- 발행일
- 2018-08-01
- 학회명
- 18th International Conference on Atomic Layer Deposition and Atomic Layer Etching
- 개최지
- 대한민국 인천 송도