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Nanoparticle engineering for next generation poly isolation chemical mechanical planarization in ULSI Process
- 제목
- Nanoparticle engineering for next generation poly isolation chemical mechanical planarization in ULSI Process
- 저자
- 백운규
- 발행일
- 2006-06-28
- 학회명
- 1st International Congress on Ceramic
- 개최지
- 캐나다 토론토