알루미노실리케이트 유리의 펨토초 레이저 나선형 드릴링 시 레이저 수직 이송 속도가 드릴링 가공 형상에 미치는 영향

초록

The effect of the vertical speed of the laser head on the high geometrical accuracy and high quality of thruholes is analyzed in the laser helical drilling of a glass substrate. The vertical speed of the laser head affects the helical layer pitch. This is a crucial parameter for determining the complete penetration and machining quality of thru-holes. An aluminosilicate glass substrate with a thickness of 400 ㎛ was drilled via a femtosecond pulsed laser at a wavelength of 1552 nm and with a pulse duration of 800 fs. The laser vertical moving speed is theoretically obtained by the relation with the laser power and the ablation depth. This theoretical method is investigated by experimental results. The vertical speed of the laser head affects the formation of cracks, chippings and heat affected zone.

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