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The Effect of SiOx/SiNxOyCz multilayer structure using Low Temperature Plasma Enhanced Atomic Layer Deposition for Gas Diffusion Barrier
- 제목
- The Effect of SiOx/SiNxOyCz multilayer structure using Low Temperature Plasma Enhanced Atomic Layer Deposition for Gas Diffusion Barrier
- 저자
- 박진성
- 발행일
- 2017-07-16
- 학회명
- 17th International Conference on Atomic Layer Deposition
- 개최지
- USA, Colorado, Denver