Fabrication of 2D metal oxide (SiO2, Al2O3, TiO2) nanoparticles patterns by nanoimprint lithography

제목
Fabrication of 2D metal oxide (SiO2, Al2O3, TiO2) nanoparticles patterns by nanoimprint lithography
저자
안진호
발행일
2011-10-28
학회명
ENGE 2011
개최지
대전컨벤션센터