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Nature of Surface defects in SOI wafers: SIMOX vs. Bonded SOI

  • 박재근
제목
Nature of Surface defects in SOI wafers: SIMOX vs. Bonded SOI
저자
박재근
발행일
2000-11-24
학회명
Advanced Science and Technology of Silicon Materials
개최지
Kona, Hawaii, U.S.A

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