Effects of in-situ remote plasma treatment on amorphous indium gallium zinc oxide thin film transistors using the double layers as an active layer

제목
Effects of in-situ remote plasma treatment on amorphous indium gallium zinc oxide thin film transistors using the double layers as an active layer
저자
홍진표
발행일
2011-10-19
학회명
한국물리학회 가을학술논문발표회
개최지
벡스코