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Effect of nitrided silicate as a buffer layer for HfO2 thin films grown by remote plasma atomic layer deposition

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Effect of nitrided silicate as a buffer layer for HfO2 thin films grown by remote plasma atomic layer deposition
저자
전형탁
발행일
2006-05-08
학회명
209th ESC meeting
개최지
dam`s Mark Denver Hotel, Denver

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