상세 보기
Sequential Design of PEALD IGZO Active Layer Using Novel Indium Precursor for Enhancing TFT Stability
- 제목
- Sequential Design of PEALD IGZO Active Layer Using Novel Indium Precursor for Enhancing TFT Stability
- 저자
- 박진성
- 발행일
- 2024-08-21
- 학회명
- IMID 2024
- 개최지
- ICC Jeju, Jeju, Korea