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Inhibition of tungsten dissolution via coordination complex for high flatness on the surface of the tungsten film during chemical mechanical planarization
- 제목
- Inhibition of tungsten dissolution via coordination complex for high flatness on the surface of the tungsten film during chemical mechanical planarization
- 저자
- 백운규
- 발행일
- 2022-10-27
- 학회명
- 2022 한국세라믹학회 추계학술대회
- 개최지
- 서울 코엑스(COEX)