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Nanotopography impact and non-prestonian behavior of ceria slurry in STI-CMP

제목
Nanotopography impact and non-prestonian behavior of ceria slurry in STI-CMP
저자
백운규
발행일
2004-02-20
학회명
제11회 한국반도체학술대회
개최지
무주리조트

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