Optical properties of molybdenum oxide thin films deposited by chemical vapor transport of MoO3(OH)2

  • Lee, Young Jung
  • Jeon, Hee Young
  • Park, Chang Won
  • Kim, Dae-Gun
  • Kim, Young Do
Citations

SCOPUS

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초록

MoO3 thin film is useful for the optical devices due to its electrochromic properties. In this study, MoO2 thin film was successfully deposited by the chemical vapor transport (CVT) of the volatile MoO3(OH)2 and subsequently, MoO3 thin film was obtained through the annealing of the deposited MoO2 thin film at 400°C in O2 atmosphere. The optical transmittance increased and absorbance peak were broadened and red-shifted as the annealing time increased reducing oxygen deficiency. CVT technique could be applied the one of technique for the deposition of molybdenum oxides thin film.

키워드

Chemical vapor transportElectrochromic propertyHydrogen reductionMolybdenum oxideOptical propertyAbsorbance peakAnnealing timeChemical vapor transportElectrochromic propertiesElectrochromic propertyHydrogen reductionMolybdenum oxideMolybdenum oxidesOptical transmittanceOxygen deficiencyRed-shiftedChemical vapor depositionElectrochromic devicesElectrochromismFunctional electric stimulationHydrogenMolybdenumMolybdenum compoundsOptical instrumentsOxide filmsOxygenThin film devicesThin filmsTransport propertiesVaporsVariable speed transmissionsDeposition
제목
Optical properties of molybdenum oxide thin films deposited by chemical vapor transport of MoO3(OH)2
저자
Lee, Young JungJeon, Hee YoungPark, Chang WonKim, Dae-GunKim, Young Do
발행일
2009-02
유형
Conference Paper
저널명
TMS Annual Meeting
3
페이지
27 ~ 32