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초록
MoO3 thin film is useful for the optical devices due to its electrochromic properties. In this study, MoO2 thin film was successfully deposited by the chemical vapor transport (CVT) of the volatile MoO3(OH)2 and subsequently, MoO3 thin film was obtained through the annealing of the deposited MoO2 thin film at 400°C in O2 atmosphere. The optical transmittance increased and absorbance peak were broadened and red-shifted as the annealing time increased reducing oxygen deficiency. CVT technique could be applied the one of technique for the deposition of molybdenum oxides thin film.
키워드
Chemical vapor transport; Electrochromic property; Hydrogen reduction; Molybdenum oxide; Optical property; Absorbance peak; Annealing time; Chemical vapor transport; Electrochromic properties; Electrochromic property; Hydrogen reduction; Molybdenum oxide; Molybdenum oxides; Optical transmittance; Oxygen deficiency; Red-shifted; Chemical vapor deposition; Electrochromic devices; Electrochromism; Functional electric stimulation; Hydrogen; Molybdenum; Molybdenum compounds; Optical instruments; Oxide films; Oxygen; Thin film devices; Thin films; Transport properties; Vapors; Variable speed transmissions; Deposition
- 제목
- Optical properties of molybdenum oxide thin films deposited by chemical vapor transport of MoO3(OH)2
- 저자
- Lee, Young Jung; Jeon, Hee Young; Park, Chang Won; Kim, Dae-Gun; Kim, Young Do
- 발행일
- 2009-02
- 유형
- Conference Paper
- 저널명
- TMS Annual Meeting
- 권
- 3
- 페이지
- 27 ~ 32