Post annealing effect of the P-type copper oxide thin films using atomic layer deposition

제목
Post annealing effect of the P-type copper oxide thin films using atomic layer deposition
저자
박진성
발행일
2013-08-27
학회명
the 9th Asian-European International Conference On Plasma Surface Engineering
개최지
Ramada plaza Jeju hotel, Jeju, Koera