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Engineering Hydrogen Content in SiNx Thin Films via Precursor Control for Improved Oxide TFT Characteristics
- 제목
- Engineering Hydrogen Content in SiNx Thin Films via Precursor Control for Improved Oxide TFT Characteristics
- 저자
- 박진성
- 발행일
- 2025-06-24
- 학회명
- ALD/ALE 2025
- 개최지
- ICC JEJU