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Atomic Layer Deposition of Al2O3 Thin Films Using TMA(Me3Al) and DMAP(Me2AlOiPr)

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Atomic Layer Deposition of Al2O3 Thin Films Using TMA(Me3Al) and DMAP(Me2AlOiPr)
저자
전형탁
발행일
2003-08-06
학회명
Atomic Layer Deposition 2003(ALD`03)
개최지
San Jose, California, USA

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