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Low Temperature growth of Silicon Oxide by Remote Plasma Atomic Layer Deposition using Bis(diethylamino)silane and O2 plasma

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Low Temperature growth of Silicon Oxide by Remote Plasma Atomic Layer Deposition using Bis(diethylamino)silane and O2 plasma
저자
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발행일
2020-10-16
학회명
2020년 온라인 추계학술대회
개최지
명지대 자연캠퍼스 창조예술관 5층

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