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Tailoring Growth and film properties of Plasma Enhanced ALD In2O3 Layer Using Amine and Alkyl-Based Novel Indium Precursors
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- Tailoring Growth and film properties of Plasma Enhanced ALD In2O3 Layer Using Amine and Alkyl-Based Novel Indium Precursors
- 저자
- 박진성
- 발행일
- 2024-06-05
- 학회명
- ISPSA 2024
- 개최지
- Ramada Plaza Jeju Hotel, Jeju, Korea