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Improvement in the bias stability of IGZO thin film transistors using Al2O3 buffer layer growth on Si3N4 dielectric layer

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Improvement in the bias stability of IGZO thin film transistors using Al2O3 buffer layer growth on Si3N4 dielectric layer
저자
전형탁
발행일
2011-10-27
학회명
2011 한국재료학회 추계학술발표대회 및 제 21회 신소재 심포지엄
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