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Measurement of negative ions by electric probes in DC and RF plasmas with O2 and SF6 gases
- 제목
- Measurement of negative ions by electric probes in DC and RF plasmas with O2 and SF6 gases
- 저자
- 이명재
- 발행일
- 2013-07-15
- 학회명
- XXXI International Conference on Phenomena in Ionized Gases
- 개최지
- Granada, Spain