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Design and optimization of a microwave plasma enhanced chemical vapor deposition system for low-pressure operations
- 제목
- Design and optimization of a microwave plasma enhanced chemical vapor deposition system for low-pressure operations
- 저자
- Ming-Chieh Lin
- 발행일
- 2025-10-17
- 학회명
- 78th Annual Gaseous Electronics Conference
- 개최지
- Seoul, Korea