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Fabrication of SiOxNy barrier film for flexible organic photovoltaic by plasma enhanced chemical vapor deposition

  • 김태환
제목
Fabrication of SiOxNy barrier film for flexible organic photovoltaic by plasma enhanced chemical vapor deposition
저자
김태환
발행일
2014-07-08
학회명
International Conference on Microelectronics and Plasma Technology 2014
개최지
Gunsan, Korea

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