Wet chemical etching of p-n-p-n structure for two-terminal vertical DRAM

  • 김은규
제목
Wet chemical etching of p-n-p-n structure for two-terminal vertical DRAM
저자
김은규
발행일
2018-07-05
학회명
19th Inter. Symp. on Physics of Semiconductors and Applications (ISPSA 2018)
개최지
Jeju, Korea