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Trap Density Reduction in High-k Dielectrics A Dual Approach with ALD Optimization and HPDA

제목
Trap Density Reduction in High-k Dielectrics A Dual Approach with ALD Optimization and HPDA
저자
박진성
발행일
2025-06-24
학회명
ALD/ALE 2025
개최지
ICC JEJU

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