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Fabrication of two-terminal capacitor-less memory from thyristor structure with p-type etching stop layer

  • 김은규
제목
Fabrication of two-terminal capacitor-less memory from thyristor structure with p-type etching stop layer
저자
김은규
발행일
2018-02-08
학회명
제54회 한국진공학회 동계정기학술대회
개최지
횡성웰리힐리파크

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