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Effect of Hydroxyl Ethyl Cellulose Concentration in Colloidal Silica Slurry on Surface Roughness for Poly-Si Chemical Mechanical Polishing

  • 박재근
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Effect of Hydroxyl Ethyl Cellulose Concentration in Colloidal Silica Slurry on Surface Roughness for Poly-Si Chemical Mechanical Polishing
저자
박재근
발행일
2008-06-20
학회명
한국전기전자재료학회 2008 하계학술대회
개최지
속초 한화리조트

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