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Negative electron-beam resist hard mask ion-beam etching process for the fabrication of nanoscale magnetic tunnel junction
- 제목
- Negative electron-beam resist hard mask ion-beam etching process for the fabrication of nanoscale magnetic tunnel junction
- 저자
- 이승백
- 발행일
- 2012-06-29
- 학회명
- International conference on Electron, Ion, and Photon Beam technology and Nanofabrication 2012
- 개최지
- Hilton Waikoloa Village, Hawaii , USA