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Effect of Abrasive Material Properties on Polishing Rate Selectivity of Nitrogen-doped Ge2Sb2Te5 to SiO2 Film in Chemical Mechanical Polishing
- 제목
- Effect of Abrasive Material Properties on Polishing Rate Selectivity of Nitrogen-doped Ge2Sb2Te5 to SiO2 Film in Chemical Mechanical Polishing
- 저자
- 백운규
- 발행일
- 2009-04-15
- 학회명
- 2009 MRS spring meeting
- 개최지
- San Francisco, USA