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Determination of Electron Temperatures by Asymmetric Double Probes in RF plasma

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제목
Determination of Electron Temperatures by Asymmetric Double Probes in RF plasma
저자
정규선
발행일
2006-10-20
학회명
2006 한국물리학회 가을학술논문발표회
개최지
대구, 대한민국

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