Investigation of thermal property of plasma-polymerized fluorocarbon thin films

초록

The physical property changes in the plasma-polymerized fluorocarbon (PPFC) thin films near the melting temperature (T-m) were investigated through chemical structure analysis. The PPFC thin films, produced by semi-crystalline polytetrafluoroethylene (PTFE)-based polymer sputtering target, form amorphous polymers with outstanding properties, such as high water repellency and high optical transmittance, electrical insulation, and chemical resistance. Interestingly, in-situ X-ray photoelectron spectroscopy analysis revealed that the PPFC thin films maintained their physical properties at temperatures above the T-m in vacuum and exhibited properties similar to those of bulk PTFE while maintaining amorphous structure. Therefore, this thin film can be applied to various devices and surface coatings manufactured at high temperatures.

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